\n \u91d1\u5c5e\u53cc\u6781\u677f\u5e02\u573a<\/strong><\/p>\n<\/section>\n<\/section>\n \u53cc\u6781\u677f\u88ab\u79f0\u4e3a\u662f\u6c22\u71c3\u6599\u7535\u6c60\u7684\u201c\u9aa8\u67b6\u201d\uff0c\u5176\u4f5c\u7528\u4e3b\u8981\u662f\u652f\u6491\u819c\u7535\u6781\u3001\u5c06\u6c22\u6c14\u548c\u6c27\u6c14\u8f93\u9001\u81f3\u819c\u7535\u6781\u5e76\u786e\u4fdd\u5176\u80fd\u5747\u5300\u5206\u5e03\u5145\u5206\u53cd\u5e94\uff0c\u540c\u65f6\u6536\u96c6\u7535\u6d41\uff0c\u5b8c\u6210\u6563\u70ed\uff0c\u6392\u51fa\u7535\u6c60\u53cd\u5e94\u4e2d\u751f\u6210\u7684\u6c34\u3002\u56e0\u6b64\uff0c\u7406\u60f3\u7684\u53cc\u6781\u677f\u9700\u8981\u5177\u5907\u5bfc\u70ed\u6027\u597d\u3001\u5bfc\u7535\u7387\u9ad8\u3001\u63a5\u89e6\u7535\u963b\u4f4e\u3001\u6c14\u5bc6\u6027\u9ad8\u3001\u673a\u68b0\u5f3a\u5ea6\u9ad8\u3001\u8010\u8150\u8680\u3001\u6613\u52a0\u5de5\u6210\u672c\u4f4e\u7b49\u6027\u80fd\u7279\u70b9\u30022019-2022\u5e74\u95f4\uff0c\u6211\u56fd\u71c3\u6599\u7535\u6c60\u6c7d\u8f66\u7528\u53cc\u6781\u677f\u5e02\u573a\u89c4\u6a21\u5206\u522b\u4e3a2.85\u4ebf\u30013.1\u4ebf\u548c6.2\u4ebf\u5143\uff0c\u77f3\u58a8\u53cc\u6781\u677f\uff08\u542b\u590d\u5408\u53cc\u6781\u677f\uff09\u5e02\u573a\u5360\u6bd4\u4ece2019\u5e74\u768478%\uff0c\u964d\u81f32020\u5e74\u768465%\u548c2021\u5e74\u768449%\uff0c\u4e0e\u4e4b\u5bf9\u5e94\u7684\uff0c\u91d1\u5c5e\u53cc\u6781\u677f\u5e02\u573a\u5360\u6bd4\u4ece22%\u300135%\uff0c\u4e0a\u5347\u52302022\u5e74\u768451%\u3002\u6839\u636e\u5171\u7814\u7f51\u7edf\u8ba1\uff0c2023\u5e74\u5168\u7403\u53cc\u6781\u677f\u5e02\u573a\u89c4\u6a21\u5230\u8fbe\u5230\u4e86\u6570\u5341\u4ebf\u5143\uff08\u4eba\u6c11\u5e01\uff09\u3002<\/strong><\/p>\n<\/section>\n<\/section>\n \n<\/section>\n \n \u91d1\u5c5e\u53cc\u6781\u677f\u6d82\u5c42\u88c5\u5907<\/strong><\/p>\n<\/section>\n<\/section>\n \n<\/section>\n<\/section>\n \n<\/section>\n \u6211\u516c\u53f8\u5177\u6709\u56fd\u9645\u9886\u5148\u7684\u9ad8\u80fd\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HiPIMS\uff09 \u7b49\u79bb\u5b50\u4f53\u53d1\u751f\u4e0e\u6210\u819c\u63a7\u5236\u5e73\u53f0\u3002\u8be5\u5e73\u53f0\u80fd\u591f\u83b7\u5f97\u6df9\u6ca1\u6027\u7684\u9ad8\u79bb\u5316\u7387\u7b49\u79bb\u5b50\u4f53\uff0c\u5e76\u4e14\u80fd\u591f\u901a\u8fc7\u6e85\u5c04\u8109\u51b2\u548c\u9ad8\u538b\u8109\u51b2\u7684\u6ce2\u5f62\u5339\u914d\uff0c\u5b9e\u73b0\u9ad8\u79bb\u5316\u7387\u6210\u819c\u7c92\u5b50\u80fd\u91cf\u53ef\u63a7\u3002\u83b7\u5f97\u4e86\u975e\u6676\u78b3\u6d82\u5c42\u3001Ti\uff0cCr\u7cfb\u5217\u7eb3\u7c73\u590d\u5408\u6d82\u5c42\u4f53\u7cfb\u7684\u6807\u51c6\u5316\u5de5\u827a\u3002<\/strong><\/p>\n<\/section>\n<\/section>\n \n<\/section>\n PEM \u7b49\u79bb\u5b50\u4f53\u53cd\u9988\u63a7\u5236\u6280\u672f\u7814\u7a76: \u91c7\u7528\u7b49\u79bb\u5b50\u4f53\u53d1\u5c04\u5149\u8c31 (PEM)\u53cd\u9988\u63a7\u5236\u65b9\u6cd5\uff0c\u5bf9\u7b49\u79bb\u5b50\u4f53\u6210\u5206\u7279\u5f81\u8c31\u7ebf\u7684\u5b9e\u65f6\u76d1\u63a7\uff0c\u5b9e\u73b0\u6210\u819c\u7c92\u5b50\u6210\u5206\u7684\u8bbe\u8ba1\u4e0e\u63a7\u5236\u3002\u638c\u63e1 PEM \u7b49\u79bb\u5b50\u4f53\u53cd\u9988\u63a7\u5236\u7684\u4f5c\u7528\u673a\u5236\uff0c\u7814\u7a76\u91d1\u5c5e\u53cc\u6781\u677f\u6d82\u5c42\u6c89\u819c\u73af\u5883\u4e0b\uff0c\u5305\u62ec\u6c14\u538b\u3001\u57fa\u4f53\u504f\u538b\u548c HiPIMS \u7535\u6e90\u7535\u538b\u8109\u51b2\u4ee5\u53ca\u9891\u7387\u7b49\u53c2\u6570\uff0cPEM \u63a7\u5236\u7cfb\u7edf\u7684\u7a33\u5b9a\u6027\u548c\u53ef\u9760\u6027\u4ee5\u53ca\u6240\u6c89\u79ef\u6d82\u5c42\u7684\u5fae\u89c2\u7ed3\u6784\u548c\u6027\u80fd\u3002\u4e3a\u91d1\u5c5e\u53cc\u6781\u677f\u9632\u62a4\u6d82\u5c42\u7684\u5236\u5907\u63d0\u4f9b\u4e86\u4e00\u4e2a\u826f\u597d\u7684\u73af\u5883\u6c89\u79ef\u3002<\/strong><\/p>\n<\/section>\n<\/section>\n \n<\/section>\n \n \n \u6d82\u5c42\u5de5\u827a\u2014\u975e\u6676\u78b3\u6d82\u5c42\uff08AC\uff09<\/strong><\/p>\n<\/section>\n<\/section>\n \n \n<\/section>\n 1\u3001\u5229\u7528HiPIMS+\u9540\u819c\u6280\u672f\u5236\u5907\u91d1\u5c5e\u53cc\u6781\u677f\u4e13\u7528\u975e\u6676\u78b3\u6d82\u5c42(AC)\u3002<\/strong><\/p>\n<\/section>\n<\/section>\n \n<\/section>\n 2\u3001\u975e\u6676\u78b3\u6d82\u5c42\u4e2d\u78b3\u539f\u5b50\u6709sp2\u548csp3\u4e24\u79cd\u6742\u5316\u7c7b\u578b\uff0c\u540c\u65f6\u5177\u6709\u77f3\u58a8\u548c\u91d1\u521a\u77f3\u7684\u6027\u80fd\uff0c\u56e0\u6b64\u5177\u5907\u826f\u597d\u7684\u5316\u5b66\u7a33\u5b9a\u6027\u548c\u81f4\u5bc6\u7684\u7ec4\u7ec7\u7ed3\u6784\u3002<\/strong><\/p>\n<\/section>\n<\/section>\n \n<\/section>\n 3\u3001\u901a\u8fc7\u8c03\u8282\u975e\u6676\u78b3\u6d82\u5c42\u4e2dsp2\u548csp3\u6742\u5316\u6bd4\u4f8b\uff0c\u53ef\u63d0\u9ad8\u975e\u6676\u78b3\u6d82\u5c42\u7684\u5bfc\u7535\u6027\u80fd\u548c\u6297\u8150\u8680\u6027\u80fd\u3002<\/span><\/strong><\/p>\n<\/section>\n<\/section>\n \u4e2d\u79d1\u8fc8\u683c\u91c7\u7528HiPIMS+\u9540\u819c\u6280\u672f\uff0c\u5f00\u53d1\u7684\u91d1\u5c5e\u53cc\u6781\u677f\u5904\u7406\u4e13\u7528\u7684\u975e\u6676\u78b3\u6d82\u5c42\uff0c\u6d82\u5c42\u539a\u5ea6\u5747\u5300\u6027\u4f18\u4e8e10%\uff0c\u5747\u5300\u81f4\u5bc6\u3002\u63a5\u89e6\u7535\u963b\u8fbe\u52300.82m\u03a9.cm\u00b2\uff0c\u7535\u5316\u5b66\u6d4b\u8bd5\u6d82\u5c42\u8010\u8150\u8680\u6027\u80fd\u4f18\u5f02\uff0c\u8150\u8680\u7535\u6d41\u53ef\u8fbe0.013\u03bcA\/cm\u00b2\uff0c\u663e\u8457\u4f18\u4e8eDOE\u6807\u51c6\u3002<\/strong><\/p>\n<\/section>\n \n<\/section>\n \n \u516c\u53f8\u4ecb\u7ecd<\/strong><\/p>\n<\/section>\n<\/section>\n \u5317\u4eac\u4e2d\u79d1\u8fc8\u683c\u79d1\u6280\u6709\u9650\u516c\u53f8<\/strong><\/span>\u6210\u7acb\u4e8e2020\u5e74\uff0c\u6280\u672f\u6765\u6e90\u4e8e\u4e2d\u79d1\u9662\u529b\u5b66\u6240\u7684\u6d82\u5c42\u56e2\u961f\uff0c\u4e13\u6ce8\u4e8e\u56fd\u9645\u9886\u5148\u6c34\u5e73\u7684\u8868\u9762\u6280\u672f\u5f00\u53d1\u5e94\u7528\uff0c\u662f\u96c6\u7814\u53d1\u3001\u8bbe\u8ba1\u3001\u751f\u4ea7\u548c\u9500\u552e\u4e3a\u4e00\u4f53\u7684\u79d1\u6280\u578b\u4f01\u4e1a\u3002<\/strong><\/span><\/p>\n \u7814\u53d1\u56e2\u961f\u5728\u771f\u7a7a\u9540\u819c\u88c5\u5907\u3001\u6d82\u5c42\u4f53\u7cfb\u8bbe\u8ba1\u9886\u57df\u62e5\u670930\u4f59\u5e74\u7684\u5de5\u4f5c\u79ef\u7d2f\uff0c\u62e5\u6709\u4e2d\u79d1\u9662\u529b\u5b66\u6240\u3001\u5317\u4eac\u822a\u7a7a\u822a\u5929\u5927\u5b66\u3001\u52a0\u62ff\u5927\u6e29\u838e\u5927\u5b66\u7b49\u56fd\u5185\u5916\u6570\u5341\u4e2a\u79d1\u7814\u56e2\u961f\u63d0\u4f9b\u6280\u672f\u652f\u6491\u3002<\/strong><\/span><\/p>\n \u516c\u53f8\u63d0\u4f9b\u53cc\u6781\u677f\u3001\u6570\u63a7\u5200\u5177\u3001\u8f66\u7528\u6a21\u5177\u3001\u96f6\u90e8\u4ef6\u7b49\u91d1\u5c5e\u8868\u9762\u6d82\u5c42\u7cfb\u7edf\u6027\u89e3\u51b3\u65b9\u6848\uff0c\u62e5\u6709\u9ad8\u80fd\u8109\u51b2\u78c1\u63a7\u6e85\u5c04(HiPIMS) \u9540\u819c\u673a\u3001\u591a\u5f27\u79bb\u5b50\u9540\u819c\u673a\u3001PEM\u7b49\u79bb\u5b50\u4f53\u63a7\u5236\u7cfb\u7edf\u3001OES\u5149\u8c31\u91c7\u96c6\u7cfb\u7edf\u3001\u5168\u81ea\u52a8\u8d85\u58f0\u6e05\u6d17\u673a\u7b49\u5148\u8fdb\u8bbe\u5907\uff0c\u786e\u4fdd\u6d82\u5c42\u7684\u4f7f\u7528\u5bff\u547d\u4e0e\u7a33\u5b9a\u6027\u3002\u516c\u53f8\u79c9\u6301\u201c\u8ba9\u6d82\u5c42\u65e0\u5904\u4e0d\u5728\u201d\u7684\u7406\u5ff5\uff0c\u901a\u8fc7\u6d82\u5c42\u8fde\u63a5\u5236\u9020\u4e0e\u4ea7\u54c1\uff0c\u5f15\u9886\u8868\u9762\u7eff\u8272\u5236\u9020\uff0c\u63a8\u52a8\u8868\u9762\u5de5\u7a0b\u9886\u57df\u7684\u9ad8\u8d28\u91cf\u53d1\u5c55\u3002<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n